TY  - BOOK
AU  - Herr, Daniel J
ED  - International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers
TI  - Metrology, inspection, and process control for microlithography XVII : 24-27 February, 2003, Santa Clara, California, USA
SN  - 9780819448439
SN  - 200429637
U1  - 621.381531 HER 
PY  - 2003///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Inspection - Congresses
KW  - Integrated circuits - Measurement - Congresses
KW  - Microlithography - Congresses
KW  - Process control - Congresses
N1  - Includes bibliographical references and author index
ER  -