TY  - BOOK
AU  - Singh, Bhanwar
ED  - SEMATECH (Organization), Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers
TI  - Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, Santa Clara, California
SN  - 9780819427779
SN  - 98226775
U1  - 621.381531 SIN 
PY  - 1998///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Inspection - Congresses
KW  - Integrated circuits - Measurement - Congresses
KW  - Microlithography - Congresses
KW  - Process control - Congresses
N1  - Includes bibliographical references and index
ER  -