TY  - BOOK
AU  - Sze, S. M
TI  - VLSI technology
SN  - 9780070582910
U1  - 621.395 SZE 
PY  - 2010///
CY  - New Delhi
PB  - Tata McGraw Hill Education
N1  - Contents : Chapter 1 Crystal Growth and water prepreparation Chapter 1 Crystal Growth and water prepreparation Chapter 2 Epitaxy Chapter 3 Oxidation Chapter 4 Lithography Chapter 5 Reactive Plasma Etching Chapter 6 Dielectric and Polysilicon Film Deposition Chapter 7 Diffusion Chapter 9 Metallization Chapter 10 Process Simulation Chapter 11 VLSI Process Integration Chapter 12 Analytical Techniques Chapter 13 Assembly techniques and Pavckaging of VLSI Devices Chapter 14 Yield and Reliability Appendixes Index &nbsp; </li>
ER  -