TY  - BOOK
AU  - Ghandhi, Sorab K
TI  - VLSI fabrication principles : silicon and gallium arsenide
SN  - 9788126517909
U1  - 621.395 GHA 
PY  - 2009///
CY  - New Delhi
PB  - Wiley India
KW  - Fabrication
N1  - Includes index
ER  -