Ghandhi, Sorab K VLSI fabrication principles : silicon and gallium arsenide Sorab K. Ghandhi - 2nd ed - New Delhi Wiley India 2009 - xxiv, 834p. : ill. ; 23 cm Includes index ISBN: 9788126517909 Subjects--Topical Terms: Fabrication Dewey Class. No.: 621.395 GHA