TY  - BOOK
AU  - Gilleo, Ken
TI  - MEMS/MOEMS packaging : concepts, designs, materials, and processes
SN  - 9780071455565
SN  - 200504959
U1  - 621.381046 GIL 
PY  - 2005///
CY  - New York
PB  - McGraw-Hill
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
KW  - Optoelectronic devices
N1  - Includes bibliographical references and index
ER  -