TY  - BOOK
AU  - Henning, Albert Karl
ED  - Sandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
TI  - MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA
SN  - 9780819456915
SN  - 200527975
U1  - 621.381 HEN 
PY  - 2005///
CY  - Bellingham, WA
PB  - SPIE
KW  - Microelectromechanical systems - Congresses
KW  - Optoelectronic devices - Congresses
N1  - Includes bibliographical references and author index
ER  -