TY  - BOOK
AU  - El-Fatatry, Ayman
AU  - Urey, Hakan
ED  - Bas-Rhin (France). Conseil général, Comité national d'optique et de photonique (France), Society of Photo-optical Instrumentation Engineers, SPIE Europe
TI  - MEMS, MOEMS, and micromachining II : 3-4 April, 2006, Strasbourg, France
SN  - 9780819462428
SN  - 200629829
U1  - 621 URE 
PY  - 2006///
CY  - Bellingham, WA
PB  - SPIE
KW  - Microelectromechanical systems - Congresses
KW  - Micromachining - Congresses
KW  - Optoelectronic devices - Congresses
N1  - Includes bibliographical references and author index
ER  -