MEMS, MOEMS, and micromachining II : 3-4 April, 2006, Strasbourg, France 
Hakan Ürey, Ayman El-Fatatry, chairs/editors ; sponsored by SPIE Europe ; cosponsored by Conseil General Du Bas-Rhin (France) ... [et al.] ; cooperating organizations CNOP--Comité National d'Optique et de Photonique (France) ... [et al.] ; published by SPIE--the International Society for Optical Engineering 
 - Bellingham, WA  SPIE  2006 
 - 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and author index 
<br/><br/><label>ISBN: </label>9780819462428 
<br/><br/><label>ISSN: </label>2006298292 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems - Congresses<br/>Micromachining - Congresses<br/>Optoelectronic devices - Congresses
<br/><br/><label>Dewey Class. No.: </label>621 URE