TY - BOOK AU - Jha, A. R TI - MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications SN - 9780849380693 SN - 200704079 U1 - 620.5 JHA PY - 2008/// CY - Boca Raton, FL PB - CRC Press KW - Aeronautics - Equipment and supplies KW - Aerospace engineering - Equipment and supplies KW - Detectors KW - Medical instruments and apparatus KW - Microelectromechanical systems KW - Telecommunication - Equipment and supplies N1 - Includes bibliographical references and index ER -