TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and microsystems : design, manufacture, and nanoscale engineering
SN  - 9780470083017
SN  - 200701704
U1  - 621.381 HSU 
PY  - 2008///
CY  - Hoboken, NJ
PB  - John Wiley
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
KW  - Microelectronics
N1  - Includes bibliographical references (p. 509-521) and index
ER  -