Hsu, Tai-Ran <br/><br/>
MEMS and microsystems : design, manufacture, and nanoscale engineering 
Tai-Ran Hsu 
 - 2nd ed 
 - Hoboken, NJ  John Wiley  2008 
 - xxv, 550 p. : ill. ; 25 cm 
<br/><br/> Includes bibliographical references (p. 509-521) and index 
<br/><br/><label>ISBN: </label>9780470083017 
<br/><br/><label>ISSN: </label>2007017041 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microelectronic packaging<br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU