TY - BOOK AU - Olivier, Scot S AU - Bifano, Thomas G AU - Kubby, Joel A TI - MEMS adaptive optics IV 27-28 January 2010, San Francisco, California, United States SN - 9780819479914 U1 - 621.381 OLI PY - 2010/// CY - Bellingham, WA PB - SPIE - Proceeding KW - Microelectromechanical systems KW - Optical instruments--Design and construction ER -