TY - BOOK AU - Bifano, Thomas G AU - Kubby, Joel A AU - Olivier, Scot S ED - Center for Adaptive Optics, Society of Photo-optical Instrumentation Engineers TI - MEMS adaptive optics : 24-25 January 2007, San Jose, California, USA SN - 9780819465801 SN - 200729917 U1 - 621.381 OLI PY - 2007/// CY - Bellingham, WA PB - SPIE KW - Microelectromechanical systems - Congresses KW - Optical instruments - Design and construction - Congresses KW - Optics, Adaptive - Congresses N1 - Includes bibliographical references and author index ER -