TY  - BOOK
AU  - Gad-el-Hak, Mohamed
TI  - MEMS : introduction and fundamentals
SN  - 9780849391378
SN  - 200505011
U1  - 621.381 GAD 
PY  - 2006///
CY  - Boca Raton, FL ; New York
PB  - CRC Taylor & Francis
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Nanotechnology
N1  - One of three parts whose previous edition was a published as a single volume. Includes bibliographical references and index
ER  -