TY  - BOOK
AU  - Korvink, J. G
AU  - Paul, Oliver
TI  - MEMS : a practical guide to design, analysis, and applications
SN  - 9780815514978
SN  - 200502349
U1  - 621 KOR 
PY  - 2006///
CY  - Norwich, NY ; Heidelberg, Germany
PB  - Springer, W. Andrew Pub
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -