Ultra clean processing of silicon surfaces V 
edited by Marc Heyns,Paul Mertens and Marc Meuris 
 - Switzerland  Scitec Publications  2003 
 - xiii, 311p. ; 25 cm 
<br/><br/><label>ISBN: </label>9783908450788 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Clean processing
<br/><br/><label>Dewey Class. No.: </label>621.38152 HEY