Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998 
editors, Marc Heybs, Marc Meuris and Paul Mertens 
 - Switzerland  Scitec Publications  1999 
 - xiv, 301 p. : ill. ; 25 cm 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9783908450405 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon surfaces<br/>Ultra clean processing
<br/><br/><label>Dewey Class. No.: </label>621.38152 HEY