TY  - BOOK
AU  - Liang, Hong
AU  - Craven, David R
TI  - Tribology in chemical-mechanical planarization
SN  - 9780824725679
SN  - 200405822
U1  - 621.92 LIA 
PY  - 2005///
CY  - Boca Raton, FL
PB  - Taylor & Francis
KW  - Chemical mechanical planarization
KW  - Grinding and polishing
KW  - Tribology
N1  - Includes bibliographical references and index
ER  -