Liang, Hong <br/><br/>
Tribology in chemical-mechanical planarization 
Hong Liang, David Craven 
 - Boca Raton, FL  Taylor & Francis  2005 
 - 185 p. : ill. ; 25 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780824725679 
<br/><br/><label>ISSN: </label>2004058221 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical mechanical planarization<br/>Grinding and polishing<br/>Tribology
<br/><br/><label>Dewey Class. No.: </label>621.92 LIA