Trends in ion implantation 
editor, Marc Van Rossum 
 - Zurich, Switerland  Trans Tech Publications  c1992 
 - [vi], 202 p. : ill. ; 25 cm. 
<br/><br/> Includes bibliographical references 
<br/><br/><label>ISBN: </label>9780878496440 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation
<br/><br/><label>Dewey Class. No.: </label>531.7 ROS