TY - BOOK AU - Harter, Andrew TI - Three-dimensional integrated circuit layout SN - 9780521416306 SN - 92165650 U1 - 621.3815 HAR PY - 1991/// CY - Cambridge PB - Cambridge University Press KW - Integrated circuit layout KW - Three-dimensional integrated circuits - Computer-aided design N1 - Includes bibliographical references and index ER -