TY  - BOOK
AU  - Lobontiu, Nicolae
AU  - Garcia, E
TI  - Mechanics of microelectromechanical systems
SN  - 9788181288493
SN  - 200430491
U1  - 621.381 LOB 
PY  - 2005///
CY  - Dordrecht ; Boston
PB  - Kluwer Academic
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -