Lobontiu, Nicolae <br/><br/>
Mechanics of microelectromechanical systems 
Nicolae Lobontiu, Ephrahim Garcia 
 - Dordrecht ; Boston  Kluwer Academic  c2005 
 - xi, 405 p. : ill. ; 23 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9788181288493 
<br/><br/><label>ISSN: </label>2004304912 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381 LOB