TY  - BOOK
AU  - Campbell, Stephen A
TI  - The science and engineering of microelectronic fabrication
SN  - 9780195136050
SN  - 51022
U1  - 621.38152 CAM 
PY  - 2001///
CY  - Oxford
PB  - Oxford University Press
KW  - Semiconductors - Design and construction
N1  - Includes bibliographical references and index
ER  -