Campbell, Stephen A <br/><br/>
The science and engineering of microelectronic fabrication 
Stephen A. Campbell 
 - 2nd ed 
 - Oxford  Oxford University Press  2001 
 - xiv, 603 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780195136050 
<br/><br/><label>ISSN: </label>51022 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors - Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152 CAM