Jaeger, Richard C., <br/><br/>
Introduction to Microelectronic Fabrication : 

 -  Pearson,  2002. 
<br/><br/><label>ISBN: </label>9780201444940 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuit.
<br/><br/><label>Dewey Class. No.: </label>621.395  / JAE