Wong, Alfred Kwok-Kit, <br/><br/>
Resolution Enhancement Techniques in Optical Lithography : 

 -  SPIE Press,  2001. 
 - 238 pages 
<br/><br/><label>ISBN: </label>9780819439956 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Science.
<br/><br/><label>Dewey Class. No.: </label>621.381531  / WON