Borisenko, Victor E., <br/><br/>
Rapid Thermal Processing of Semiconductors : 

 -  Boom Koninklijke Uitgevers,  1997. 
 - 384 pages 
<br/><br/><label>ISBN: </label>9780306450549 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Science.
<br/><br/><label>Dewey Class. No.: </label>621.38152  / BOR