Annual Symposium on Photomask Technology : 

 -  1999. 
 - 502 pages 
<br/><br/><label>ISBN: </label>9780819434685 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits.
<br/><br/><label>Dewey Class. No.: </label>621.381531  / ABB.3873