TY - BOOK AU - Varadan, V. K. TI - Smart Structures And Materials 2001 : Smart Electronics, Mems T2 - Proceedings of SPIE--the International Society for Optical Engineering SN - 9780819440204 U1 - 621.381 PY - 2001/// CY - Bellingham PB - Spie--the International Society For Optical Engineering, KW - Electronics N1 - index ER -