Zhou, Zhaoying, <br/><br/>
MEMS/NEMS Technology and Applications : 

 -  Society of Photo Optical,  2009. 
 - 188 pages 
<br/><br/><label>ISBN: </label>9780819474032 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Technology & Engineering.
<br/><br/><label>Dewey Class. No.: </label>681.4  / ZHO