2009 International Conference on Optical Instruments and Technology : 

 -  SPIE-International Society for Optical Engineering,  2009. 
 - 194 pages 
<br/><br/><label>ISBN: </label>9780819478962 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Dewey Class. No.: </label>681.4  / ZHO