TY  - BOOK
AU  - Kimmel, Kurt R. ;  Staud, Wolfgang 
TI  - 23rd Annual Bacus Symposium On Photomask Technology : 9-12 September, 2003, Monterey, California, Usa
T2  - Proceedings of SPIE--the International Society for Optical Engineering
SN  - 0819451436
U1  - 621.381531 
PY  - 2003///
CY  - Bellingham
PB  - Spie
KW  - Integrated Circuits Masks
KW  - Microlithography
N1  - Bib and Ref
ER  -