Varadan, Vijay Krishna, <br/><br/>
Smart Electronics and MEMS : 

 -  2002. 
 - 360 pages 
<br/><br/><label>ISBN: </label>9780819444486 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Actuators.
<br/><br/><label>Dewey Class. No.: </label>620.11  / VAR