Materials aspects in microsystem technologies : proceedings of symposium H on materials aspects in Microsystem technologies of the E-MRS 1998 spring conference, Strasbourg, France, June 16-19, 1998 
edited by D. Barbier ... [et al.] 
 - Amsterdam  Elsevier  1999 
 - 257 p. : ill. ; 29 cm 
<br/><br/> Reprinted from: Sensors and actuators, v. 74, no. 1-3, 1999. Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780080436111 
<br/><br/><label>ISSN: </label>708570 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors - Congresses<br/>Microactuators - Congresses<br/>Microelectromechanical systems - Congresses<br/>Microelectronics - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 BAR