TY  - BOOK
AU  - Pauleau, Yves
TI  - Materials and processes for surface and interface engineering
SN  - 9780792334583
SN  - 95011665
U1  - 620.44 PAU 
PY  - 1995///
CY  - Dordrecht ; Boston
PB  - Kluwer Academic Publishers
KW  - Interfaces (Physical sciences)
KW  - Plasma-enhanced chemical vapor deposition
KW  - Surfaces (Technology)
KW  - Thin films
KW  - Vapor plating
N1  - Includes bibliographical references and index
ER  -