Naka, Yuji <br/><br/>
Introduction to VLSI Process Engineering (Pb) 
Yuji Naka 
 - 1st edition 
 -  Springer  1993 
 - 210 p. 
<br/><br/><label>ISBN: </label>9789402419672 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>621.395  / NAK