TY  - BOOK
AU  - Barnat, Edward V
AU  - Lu, T. -M
TI  - Pulsed and pulsed bias sputtering : principles and applications
SN  - 9781402075438
SN  - 200305498
U1  - 621.38152 BAR 
PY  - 2003///
CY  - Boston
PB  - Kluwer Academic
KW  - Cathode sputtering (Plating process)
KW  - Thin films
N1  - Includes bibliographical references and index
ER  -