TY  - BOOK
AU  - Dang, Kim
AU  - Toprac, Anthony J
ED  - Electrochemical Society, Society of Photo-optical Instrumentation Engineers
TI  - Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California
SN  - 9780819434791
SN  - 710613
U1  - 621.3815 top 
PY  - 1999///
CY  - Bellingham, WA
PB  - SPIE
KW  - Dielectric films - Congresses
KW  - Integrated circuits - Design and construction - Congresses
KW  - Metallizing - Congresses
KW  - Plasma etching - Congresses
KW  - Process control - Congresses
N1  - Includes bibliographical references and index
ER  -