Process and equipment control in microelectronic manufacturing II : 30-31 may 2001, Edinburgh, UK 
Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK) 
 - Bellingham, WA  SPIE  c2001 
 - v, 158 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819441065 
<br/><br/><label>ISSN: </label>2002510017 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Very large scale integration - Design and construction - Congresses<br/>Microelectronics - Materials - Congresses<br/>Microelectronics industry - Production control - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 FAL