Proceedings of the 9th international autumn meeting gettering and defect engineering in semiconductor technology : GADEST 2001, S. Tecla, Italy, September 30-October 3, 2001 editors, V. Raineri ... [et al.] - Uetikon-Zürich, Switzerland ; Enfield, N.H Sci-Tech Pub. Ltd. ; Trans Tech Pub. Ltd. [distributor] 2002 - xviii, 823 p. : ill. ; 25 cm

Includes bibliographical references and index

9783908450641

2002265757


Electrical engineering - Materials - Congresses
Getters - Congresses
Semiconductors - Defects - Congresses
Silicon crystals - Defects - Congresses

621.38152 RAI