TY  - BOOK
AU  - Claeys, Cor L
ED  - International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (7th : 1997 : Spa, Belgium)
TI  - Proceedings of the 7th international autumn meeting gettering and defect engineering in semiconductor technology : GADEST '97, Spa, Belgium, October 5-10, 1997
SN  - 9783908450276
SN  - 99221384
U1  - 537.622 CLA 
PY  - 1997///]
CY  - Zurich ; Enfield, N.H
PB  - Scitec Pub. Ltd. ; Trans Tech Pub. Ltd. [distributor]
KW  - Electrical engineering - Materials - Congresses
KW  - Getters - Congresses
KW  - Semiconductors - Congresses
KW  - Silicon crystals - Defects - Congresses
N1  - Includes bibliographical references and index
ER  -