Santos, Hector J De Los <br/><br/>
Principles and applications of nano MEMS physics 
Hector J De Los Santos 
 - New Delhi  [publisher not identified]  c2005 
 - xv,254p 
<br/><br/><label>ISBN: </label>9788181288530 
<br/><br/><label>Dewey Class. No.: </label>620.5 SAN