Polymers in microlithography : materials and processes 
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor 
 - Washington, DC  American Chemical Society  1989 
 - xii, 449 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780841217010 
<br/><br/><label>ISSN: </label>89017931 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography - Materials - Congresses<br/>Photoresists - Congresses<br/>Polymers - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381531 REI