TY  - BOOK
AU  - Horie, Kazuyuki
AU  - Ito, Hiroshi
AU  - Tagawa, Seichi
ED  - American Chemical Society. Division of Polymeric Materials: Science and Engineering, Kōbunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group
TI  - Polymeric materials for microelectronic applications : science and technology
SN  - 9780841230552
SN  - 94038922
U1  - 621.381 ITO 
PY  - 1994///
CY  - Washington, DC
PB  - American Chemical Society
KW  - Microelectronics - Materials - Congresses
KW  - Polymers - Congresses
N1  - Includes bibliographical references and index
ER  -