Polymeric materials for microelectronic applications : science and technology 
Hiroshi Ito, editor, Seiichi Tagawa, editor, Kazuyuki Horie, editor 
 - Washington, DC  American Chemical Society  1994 
 - ix, 468 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780841230552 
<br/><br/><label>ISSN: </label>94038922 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics - Materials - Congresses<br/>Polymers - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 ITO