TY  - BOOK
AU  - Graef, Mart
AU  - Patel, Divyesh N
ED  - Electrochemical Society, Society of Photo-optical Instrumentation Engineers
TI  - Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California
SN  - 819434809
SN  - 266007
U1  - TK7874.75 .M86 1999 621.39/5 
PY  - 1999///
CY  - Bellingham, WA
PB  - SPIE
KW  - Dielectric films - Congresses
KW  - Integrated circuits - Very large scale integration - Design and construction - Congresses
KW  - Metallizing - Congresses
KW  - Plasma etching - Congresses
N1  - Includes bibliographical references and index
ER  -