Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California 
Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] 
 - Bellingham, WA  SPIE  c1999 
 - ix, 184 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819434807 
<br/><br/><label>ISSN: </label>266007 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectric films - Congresses<br/>Integrated circuits - Very large scale integration - Design and construction - Congresses<br/>Metallizing - Congresses<br/>Plasma etching - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.395 GRA