Allen, James J <br/><br/>
Micro electro mechanical system design 
James J. Allen 
 - Baca Raton, FL  Taylor & Francis  2005 
 - [xxvi], 465 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780824758240 ; 0824758242 
<br/><br/><label>ISSN: </label>2005041771 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Conception technique<br/>Engineering design<br/>Microelectromechanical systems - Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.381 ALL